Dimensional measurement of microform with high aspect ratio using an optically controlled particle with standing wave scale sensing

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi, Taisuke Washitani

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

A new measurement technique based on the localized optical interference scale formed by a standing wave is proposed. The scale is sensed using a microprobe controlled three dimensionally by radiation pressure. The feasibility of this novel probing technique is examined by measuring the depth of a micro-groove using the displacement sensing method based on a coordinate measurement system. Since the effective length of the standing wave scale is more than 250 μm, the microprobe enables us to measure a micro-fine figure with a high aspect ratio.

Original languageEnglish
Pages (from-to)479-482
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume61
Issue number1
DOIs
Publication statusPublished - Apr 16 2012
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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