Dimensional measurement of microform with high aspect ratio using an optically controlled particle with standing wave scale sensing

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi, Taisuke Washitani

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

A new measurement technique based on the localized optical interference scale formed by a standing wave is proposed. The scale is sensed using a microprobe controlled three dimensionally by radiation pressure. The feasibility of this novel probing technique is examined by measuring the depth of a micro-groove using the displacement sensing method based on a coordinate measurement system. Since the effective length of the standing wave scale is more than 250 μm, the microprobe enables us to measure a micro-fine figure with a high aspect ratio.

Original languageEnglish
Pages (from-to)479-482
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume61
Issue number1
DOIs
Publication statusPublished - Apr 16 2012
Externally publishedYes

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Microforms
Aspect ratio
Light interference
Radiation

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Cite this

Dimensional measurement of microform with high aspect ratio using an optically controlled particle with standing wave scale sensing. / Takaya, Yasuhiro; Michihata, Masaki; Hayashi, Terutake; Washitani, Taisuke.

In: CIRP Annals - Manufacturing Technology, Vol. 61, No. 1, 16.04.2012, p. 479-482.

Research output: Contribution to journalArticle

@article{008da3b6104a46b3847e11e42ae4bb69,
title = "Dimensional measurement of microform with high aspect ratio using an optically controlled particle with standing wave scale sensing",
abstract = "A new measurement technique based on the localized optical interference scale formed by a standing wave is proposed. The scale is sensed using a microprobe controlled three dimensionally by radiation pressure. The feasibility of this novel probing technique is examined by measuring the depth of a micro-groove using the displacement sensing method based on a coordinate measurement system. Since the effective length of the standing wave scale is more than 250 μm, the microprobe enables us to measure a micro-fine figure with a high aspect ratio.",
author = "Yasuhiro Takaya and Masaki Michihata and Terutake Hayashi and Taisuke Washitani",
year = "2012",
month = "4",
day = "16",
doi = "10.1016/j.cirp.2012.03.114",
language = "English",
volume = "61",
pages = "479--482",
journal = "CIRP Annals - Manufacturing Technology",
issn = "0007-8506",
publisher = "Elsevier USA",
number = "1",

}

TY - JOUR

T1 - Dimensional measurement of microform with high aspect ratio using an optically controlled particle with standing wave scale sensing

AU - Takaya, Yasuhiro

AU - Michihata, Masaki

AU - Hayashi, Terutake

AU - Washitani, Taisuke

PY - 2012/4/16

Y1 - 2012/4/16

N2 - A new measurement technique based on the localized optical interference scale formed by a standing wave is proposed. The scale is sensed using a microprobe controlled three dimensionally by radiation pressure. The feasibility of this novel probing technique is examined by measuring the depth of a micro-groove using the displacement sensing method based on a coordinate measurement system. Since the effective length of the standing wave scale is more than 250 μm, the microprobe enables us to measure a micro-fine figure with a high aspect ratio.

AB - A new measurement technique based on the localized optical interference scale formed by a standing wave is proposed. The scale is sensed using a microprobe controlled three dimensionally by radiation pressure. The feasibility of this novel probing technique is examined by measuring the depth of a micro-groove using the displacement sensing method based on a coordinate measurement system. Since the effective length of the standing wave scale is more than 250 μm, the microprobe enables us to measure a micro-fine figure with a high aspect ratio.

UR - http://www.scopus.com/inward/record.url?scp=84861600794&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84861600794&partnerID=8YFLogxK

U2 - 10.1016/j.cirp.2012.03.114

DO - 10.1016/j.cirp.2012.03.114

M3 - Article

AN - SCOPUS:84861600794

VL - 61

SP - 479

EP - 482

JO - CIRP Annals - Manufacturing Technology

JF - CIRP Annals - Manufacturing Technology

SN - 0007-8506

IS - 1

ER -