Direct comparison of emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced plasmas with solid tin target

Hiroki Tanaka, Atsushi Matsumoto, Kouzi Akinaga, Akihiko Takahashi, Tatsuo Okada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we report the emission characteristics of extreme ultraviolet radiation at 13.5 nm from the CO2 and the Nd:YAG laser-produced plasmas with a solid tin target measured by the same measurement system.

Original languageEnglish
Title of host publicationInternational Quantum Electronics Conference 2005
Pages1151-1152
Number of pages2
DOIs
Publication statusPublished - Dec 1 2005

Publication series

NameIQEC, International Quantum Electronics Conference Proceedings
Volume2005

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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    Tanaka, H., Matsumoto, A., Akinaga, K., Takahashi, A., & Okada, T. (2005). Direct comparison of emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced plasmas with solid tin target. In International Quantum Electronics Conference 2005 (pp. 1151-1152). [1561042] (IQEC, International Quantum Electronics Conference Proceedings; Vol. 2005). https://doi.org/10.1109/IQEC.2005.1561042