TY - GEN
T1 - Direct etching and implanted metalization in soft matter
AU - Ichikawa, K.
AU - Fukuyama, Y.
AU - Maeda, S.
AU - Yamanishi, Y.
N1 - Funding Information:
This research is supported by JST PRESTO, JST A-STEP (AS2711910U) and JSPS KAKENHI Grant Number (JP16H04307) and authors thank to BEX Co., Ltd. for valuable advices for power supply..
PY - 2020
Y1 - 2020
N2 - We have successfully carried out direct implantable metallization (plating) on soft polymer such as PDMS using electrically induced microbubbles. Novelties of this technology is; 1. No requirement of complicated pretreatment procedure on the surface of any substrate before plating and which is unlike the non-electrolytic plating, 2. Resolution of the plating can be reached to several-tens micron within short time with low cost, 3. Robust metallization on wide range of material locally and precisely without any masks and so on. We evaluated robustness and resolution of metallization in our method.
AB - We have successfully carried out direct implantable metallization (plating) on soft polymer such as PDMS using electrically induced microbubbles. Novelties of this technology is; 1. No requirement of complicated pretreatment procedure on the surface of any substrate before plating and which is unlike the non-electrolytic plating, 2. Resolution of the plating can be reached to several-tens micron within short time with low cost, 3. Robust metallization on wide range of material locally and precisely without any masks and so on. We evaluated robustness and resolution of metallization in our method.
UR - http://www.scopus.com/inward/record.url?scp=85079586294&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85079586294&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85079586294
T3 - 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017
SP - 421
EP - 422
BT - 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017
PB - Chemical and Biological Microsystems Society
T2 - 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017
Y2 - 22 October 2017 through 26 October 2017
ER -