We have investigated direct etching of poly(methyl methacrylate) (PMMA) using laser plasma soft X-rays. We focused soft X-rays of 6-25 nm on PMMA sheets efficiently using an Au coated ellipsoidal mirror. 7 × 10-2 2% of laser energy is estimated to be converted to soft X-rays that was incident to the PMMA sheets. We found that PMMA surfaces are etched beyond a threshold power density. The energy density of absorbed soft X-rays at the threshold is 7 kJ/cm3. The results suggest that etching is governed by decomposition into fragments.
|Journal||Applied Physics Express|
|Publication status||Published - Jun 2010|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)