Direct etching of poly(methyl methacrylate) using laser plasma soft X-rays

Shuichi Torii; Tetsuya Makimura; Kouta Okazaki; Daisuke Nakamura; Akihiko Takahashi; Tatsuo Okada; Hiroyuki Niino; Kouichi Murakami

doi:10.1143/APEX.3.066502

Direct etching of poly(methyl methacrylate) using laser plasma soft X-rays

Shuichi Torii, Tetsuya Makimura, Kouta Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Kouichi Murakami

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

We have investigated direct etching of poly(methyl methacrylate) (PMMA) using laser plasma soft X-rays. We focused soft X-rays of 6-25 nm on PMMA sheets efficiently using an Au coated ellipsoidal mirror. 7 × 10^-2 2% of laser energy is estimated to be converted to soft X-rays that was incident to the PMMA sheets. We found that PMMA surfaces are etched beyond a threshold power density. The energy density of absorbed soft X-rays at the threshold is 7 kJ/cm³. The results suggest that etching is governed by decomposition into fragments.

Original language	English
Article number	066502
Journal	Applied Physics Express
Volume	3
Issue number	6
DOIs	https://doi.org/10.1143/APEX.3.066502
Publication status	Published - Jun 2010

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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10.1143/APEX.3.066502

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title = "Direct etching of poly(methyl methacrylate) using laser plasma soft X-rays",

abstract = "We have investigated direct etching of poly(methyl methacrylate) (PMMA) using laser plasma soft X-rays. We focused soft X-rays of 6-25 nm on PMMA sheets efficiently using an Au coated ellipsoidal mirror. 7 × 10-2 2% of laser energy is estimated to be converted to soft X-rays that was incident to the PMMA sheets. We found that PMMA surfaces are etched beyond a threshold power density. The energy density of absorbed soft X-rays at the threshold is 7 kJ/cm3. The results suggest that etching is governed by decomposition into fragments.",

author = "Shuichi Torii and Tetsuya Makimura and Kouta Okazaki and Daisuke Nakamura and Akihiko Takahashi and Tatsuo Okada and Hiroyuki Niino and Kouichi Murakami",

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AU - Torii, Shuichi

AU - Makimura, Tetsuya

AU - Okazaki, Kouta

AU - Nakamura, Daisuke

AU - Takahashi, Akihiko

AU - Okada, Tatsuo

AU - Niino, Hiroyuki

AU - Murakami, Kouichi

PY - 2010/6

Y1 - 2010/6

N2 - We have investigated direct etching of poly(methyl methacrylate) (PMMA) using laser plasma soft X-rays. We focused soft X-rays of 6-25 nm on PMMA sheets efficiently using an Au coated ellipsoidal mirror. 7 × 10-2 2% of laser energy is estimated to be converted to soft X-rays that was incident to the PMMA sheets. We found that PMMA surfaces are etched beyond a threshold power density. The energy density of absorbed soft X-rays at the threshold is 7 kJ/cm3. The results suggest that etching is governed by decomposition into fragments.

AB - We have investigated direct etching of poly(methyl methacrylate) (PMMA) using laser plasma soft X-rays. We focused soft X-rays of 6-25 nm on PMMA sheets efficiently using an Au coated ellipsoidal mirror. 7 × 10-2 2% of laser energy is estimated to be converted to soft X-rays that was incident to the PMMA sheets. We found that PMMA surfaces are etched beyond a threshold power density. The energy density of absorbed soft X-rays at the threshold is 7 kJ/cm3. The results suggest that etching is governed by decomposition into fragments.

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Direct etching of poly(methyl methacrylate) using laser plasma soft X-rays

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