Direct etching of poly(methyl methacrylate) using laser plasma soft X-rays

Shuichi Torii, Tetsuya Makimura, Kouta Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Kouichi Murakami

Research output: Contribution to journalArticle

10 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy