Dislocation tomography made easy: A reconstruction from ADF STEM images obtained using automated image shift correction

J. H. Sharp, J. S. Barnard, Kenji Kaneko, K. Higashida, P. A. Midgley

Research output: Contribution to journalArticle

29 Citations (Scopus)

Abstract

After previous work producing a successful 3D tomographic reconstruction of dislocations in GaN from conventional weak-beam dark-field (WBDF) images, we have reconstructed a cascade of dislocations in deformed and annealed silicon to a comparable standard using the more experimentally straightforward technique of STEM annular dark-field imaging (STEM ADF). In this mode, image contrast was much more consistent over the specimen tilt range than in conventional weak-beam dark-field imaging. Automatic acquisition software could thus restore the correct dislocation array to the field of view at each tilt angle, though manual focusing was still required. Reconstruction was carried out by sequential iterative reconstruction technique using FEI's Inspect3D software. Dislocations were distributed non-uniformly along cascades, with sparse areas between denser clumps in which individual dislocations of in-plane image width 24 nm could be distinguished in images and reconstruction. Denser areas showed more complicated stacking-fault contrast, hampering tomographic reconstruction. The general three-dimensional form of the denser areas was reproduced well, showing the dislocation array to be planar and not parallel to the foil surfaces.

Original languageEnglish
Article number012013
JournalJournal of Physics: Conference Series
Volume126
DOIs
Publication statusPublished - Jan 1 2008

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tomography
shift
cascades
computer programs
image contrast
clumps
crystal defects
field of view
foils
acquisition
silicon

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Dislocation tomography made easy : A reconstruction from ADF STEM images obtained using automated image shift correction. / Sharp, J. H.; Barnard, J. S.; Kaneko, Kenji; Higashida, K.; Midgley, P. A.

In: Journal of Physics: Conference Series, Vol. 126, 012013, 01.01.2008.

Research output: Contribution to journalArticle

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