Dominant ion species in VHF SiH4/H2 plasma

Yasuhiro Yamauchi, Tomoyoshi Baba, Tsukasa Yamane, Yoshiaki Takeuchi, Hiromu Takatsuka, Hiroshi Muta, Kiichiro Uchino, Yoshinobu Kawai

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

Dominant ion species in VHF SiH4/H2 plasma (frequency 60 MHz) were estimated from the sheath potential and the electron temperature measured with the Langmuir probe. As the concentration of SiH4/H 2 was increased, the transition of dominant ion species from H + to SiH3+ was observed. When the discharge gap was shorter than 10 mm, measured sheath potentials were anomalously low compared with the calculated ones.

Original languageEnglish
Pages (from-to)549-552
Number of pages4
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Volume7
Issue number3-4
DOIs
Publication statusPublished - May 27 2010
Event23rd International Conference on Amorphous and Nanocrystalline Semiconductors, ICANS23 - Utrecht, Netherlands
Duration: Aug 23 2009Aug 28 2009

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sheaths
plasma frequencies
electrostatic probes
ions
electron energy

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

Cite this

Yamauchi, Y., Baba, T., Yamane, T., Takeuchi, Y., Takatsuka, H., Muta, H., ... Kawai, Y. (2010). Dominant ion species in VHF SiH4/H2 plasma. Physica Status Solidi (C) Current Topics in Solid State Physics, 7(3-4), 549-552. https://doi.org/10.1002/pssc.200982661

Dominant ion species in VHF SiH4/H2 plasma. / Yamauchi, Yasuhiro; Baba, Tomoyoshi; Yamane, Tsukasa; Takeuchi, Yoshiaki; Takatsuka, Hiromu; Muta, Hiroshi; Uchino, Kiichiro; Kawai, Yoshinobu.

In: Physica Status Solidi (C) Current Topics in Solid State Physics, Vol. 7, No. 3-4, 27.05.2010, p. 549-552.

Research output: Contribution to journalConference article

Yamauchi, Y, Baba, T, Yamane, T, Takeuchi, Y, Takatsuka, H, Muta, H, Uchino, K & Kawai, Y 2010, 'Dominant ion species in VHF SiH4/H2 plasma', Physica Status Solidi (C) Current Topics in Solid State Physics, vol. 7, no. 3-4, pp. 549-552. https://doi.org/10.1002/pssc.200982661
Yamauchi Y, Baba T, Yamane T, Takeuchi Y, Takatsuka H, Muta H et al. Dominant ion species in VHF SiH4/H2 plasma. Physica Status Solidi (C) Current Topics in Solid State Physics. 2010 May 27;7(3-4):549-552. https://doi.org/10.1002/pssc.200982661
Yamauchi, Yasuhiro ; Baba, Tomoyoshi ; Yamane, Tsukasa ; Takeuchi, Yoshiaki ; Takatsuka, Hiromu ; Muta, Hiroshi ; Uchino, Kiichiro ; Kawai, Yoshinobu. / Dominant ion species in VHF SiH4/H2 plasma. In: Physica Status Solidi (C) Current Topics in Solid State Physics. 2010 ; Vol. 7, No. 3-4. pp. 549-552.
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