Dominant ion species in VHF SiH4/H2 plasma (frequency 60 MHz) were estimated from the sheath potential and the electron temperature measured with the Langmuir probe. As the concentration of SiH4/H 2 was increased, the transition of dominant ion species from H + to SiH3+ was observed. When the discharge gap was shorter than 10 mm, measured sheath potentials were anomalously low compared with the calculated ones.
|Number of pages||4|
|Journal||Physica Status Solidi (C) Current Topics in Solid State Physics|
|Publication status||Published - 2010|
|Event||23rd International Conference on Amorphous and Nanocrystalline Semiconductors, ICANS23 - Utrecht, Netherlands|
Duration: Aug 23 2009 → Aug 28 2009
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics