Droplet-free thin films prepared by pulsed laser deposition using a vane velocity filter

Tsuyoshi Yoshitake, Gousuke Shiraishi, Kunihito Nagayama

    Research output: Contribution to journalArticlepeer-review

    11 Citations (Scopus)

    Abstract

    Pulsed laser deposition is an effective method of fabricating a large variety of thin films. However, it has a serious disadvantage in that many droplets with diameters of 1-10/μm are deposited together with the ablation species. In order to eliminate droplets, a velocity filter containing many vanes was adopted, by means of which the number of droplets decreased markedly. The velocity distribution of the droplets was obtained for various droplet sizes. The maximum velocity Of the droplets is 65 m/s. This shows that it is possible to eliminate the droplets completely at a suitable cutoff velocity of the filter.

    Original languageEnglish
    Pages (from-to)836-837
    Number of pages2
    JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    Volume41
    Issue number2 A
    DOIs
    Publication statusPublished - Feb 2002

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

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