DSMC analysis of thermal transpiration of capacitance diaphragm gauge

Shin Ichi Nishizawa, Masahiro Hirata

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Fingerprint

Dive into the research topics of 'DSMC analysis of thermal transpiration of capacitance diaphragm gauge'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds