Dynamics of photo-excitation for the ablation of 4H-SiC substrate using femtosecond laser

Keigo Matsunaga, Terutake Hayashi, Syuhei Kurokawa, Hideaki Yokoo, Noboru Hasegawa, Masaharu Nishikino, Yoji Matsukawa

Research output: Contribution to conferencePaperpeer-review

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Engineering & Materials Science