Effect of bias application on c-BN synthesis by induction thermal plasmas under atmospheric pressure

Takayuki Watanabe, Ryoichi Sataka, Kenji Yamamoto

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Synthesis of c-BN was enhanced with DC bias application on the substrate in atmospheric pressure induction plasmas in this study. Previous c-BN synthesis has been performed under reduced pressure using explosive and hazardous gases. For industrial application such as coating on cutting tools, improvement of c-BN synthesis method has been strongly required. Therefore, the purpose of this paper is to investigate the mechanism of enhanced c-BN synthesis with bias application using safe starting material, h-BN and boron powder, under atmospheric pressure. The bias application leads to the optimum B/N ratio as well as the reduction of oxygen impurity in the deposits, resulting in the successful c-BN synthesis under atmospheric pressure. Important process for c-BN formation is attributed to the formation of high density of activated species such as N+, and the quenching process on the substrate. We conclude that bias application is important to increase activated species.

Original languageEnglish
Pages (from-to)4462-4467
Number of pages6
JournalThin Solid Films
Volume516
Issue number13
DOIs
Publication statusPublished - May 1 2008
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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