Effect of buffer layer on epitaxial growth of YSZ deposited on Si substrate by slower Q-switched 266 nm YAG laser

Satoru Kaneko, Kensuke Akiyama, Yoshitada Shimizu, Takeshi Ito, Shinji Yasaka, Masahiko Mitsuhashi, Seishiro Ohya, Keisuke Saito, Takayuki Watanabe, Shoji Okamoto, Hiroshi Funakubo

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14 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy