Effect of carbon content on the tribological behavior of TiCxN1-x films prepared by arc-vapor deposition

Xuan Hoa Nguyen, In Ki Kim, Byung Koog Jang, Yoon Suk Oh

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The effects of carbon content on the tribological behavior of titanium carbonitride(TiCxN1-x) films have been studied herein. A set of titanium carbonitride(TiCxN1-x) films was prepared by arc ion plating with a pure Ti target and a gas mixture of C2H2/N2 on a steel substrate. High-definition field-emission scanning electron microscopy (FESEM) was used to investigate the microstructure of the films. The chemical composition of the films was analyzed using both electron dispersion spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS) analysis. The surface roughness and microhardness of the films were measured using α-step profilometer and nanoindenter respectively. The tribology of titanium carbonitride(TiCxN1-x) films was investigated using a ballon-disc testing method and the wear tracks were observed by low-magnification SEM. The tribological behavior of the films was significantly changed with variation of the C2H2/N2 gas ratio. A very low friction coefficient (0.07) of titanium carbonitride(TiCxN1-x) film was observed when the C2H2:N2 gas ratio was about 3:2.

Original languageEnglish
Pages (from-to)961-967
Number of pages7
JournalJournal of the Ceramic Society of Japan
Volume121
Issue number1420
DOIs
Publication statusPublished - Dec 2013

Fingerprint

Vapor deposition
Carbon
arcs
vapor deposition
Carbon nitride
carbon
titanium
Titanium
Gases
tribology
profilometers
ion plating
Scanning electron microscopy
scanning electron microscopy
Tribology
Steel
magnification
gases
Plating
Gas mixtures

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

Cite this

Effect of carbon content on the tribological behavior of TiCxN1-x films prepared by arc-vapor deposition. / Nguyen, Xuan Hoa; Kim, In Ki; Jang, Byung Koog; Oh, Yoon Suk.

In: Journal of the Ceramic Society of Japan, Vol. 121, No. 1420, 12.2013, p. 961-967.

Research output: Contribution to journalArticle

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