Effect of centrifugal etching in micro-fabricated CuFeTe2 thin films for Oxygen Sensor Devices

Masatoshi Kozaki, Nobuhiko Nagashima, Akihiro Ikeda, Hisao Kuriyaki, Kiyoshi Toko

Research output: Contribution to journalArticle

Abstract

New types of oxygen sensor that can operate at room temperature using the intercalation of oxygen molecules for the layered compounds CuFeTe2 have been developed. In our previous experiment, response time for oxygen partial pressure was improved by using wet etching and photolithography for forming many fine holes on the surface of single-crystal CuFeTe2 thin films. However, the resistance change was small in an oxygen gas response because sufficient etching depth was not obtained. In this study, we report application of deep etching onto CuFeTe2 single crystal using of centrifugal etching in order to improve the aspect ratio and the etching depth.

Original languageEnglish
Pages (from-to)15-20
Number of pages6
JournalResearch Reports on Information Science and Electrical Engineering of Kyushu University
Volume20
Issue number1
Publication statusPublished - Jan 1 2015

All Science Journal Classification (ASJC) codes

  • Computer Science(all)
  • Electrical and Electronic Engineering

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