Effect of centrifugal etching in micro-fabricated CuFeTe₂ thin films for Oxygen Sensor Devices

Engineering

• Thin Films 40%
• Centrifugal 40%
• Surfaces 20%
• Applications 20%
• Experiments 20%
• Aspect Ratio 20%
• Forming 20%
• Room Temperature 20%
• Sensor Device 20%
• Oxygen Gas 20%
• Response Time 20%
• Gas Response 20%
• Oxygen Partial Pressure 20%
• Oxygen Molecule 20%
• Resistance Change 20%

Physics

• Etching 100%
• Thin Films 40%
• Oxygen 40%
• Single Crystals 40%
• Utilization 20%
• Aspect Ratio 20%
• Room Temperature 20%
• Photolithography 20%
• Intercalation 20%

Material Science

• Etching 100%
• Thin Films 40%
• Single Crystal 40%
• Sensor 40%
• Surface 20%
• Wet Etching 20%