Effect of chromium underlayer on the properties of nano-crystalline diamond films

E. Garratt, S. Alfaify, T. Yoshitake, Y. Katamune, M. Bowden, M. Nandasiri, M. Ghantasala, D. C. Mancini, S. Thevuthasan, A. Kayani

    Research output: Contribution to journalArticle

    8 Citations (Scopus)

    Abstract

    This paper investigated the effect of chromium underlayer on the structure, microstructure, and composition of the nano-crystalline diamond films. Nano-crystalline diamond thin films were deposited at high temperature in microwave-induced plasma diluted with nitrogen, on single crystal silicon substrate with a thin film of chromium as an underlayer. Characterization of the film was implemented using non-Rutherford backscattering spectrometry, Raman spectroscopy, near-edge x-ray absorption fine structure, x-ray diffraction, and atomic force microscopy. Nanoindentation studies showed that the films deposited on chromium underlayer have higher hardness values compared to those deposited on silicon without an underlayer. Diamond and graphitic phases of the films evaluated by x-ray and optical spectroscopic analyses determined consistency between the sp2 and sp3 phases of carbon in chromium sample to that of diamond grown on silicon. Diffusion of chromium was observed using ion beam analysis which was correlated with the formation of chromium complexes by x-ray diffraction.

    Original languageEnglish
    Article number011913
    JournalApplied Physics Letters
    Volume102
    Issue number1
    DOIs
    Publication statusPublished - Jan 7 2013

    Fingerprint

    diamond films
    chromium
    diamonds
    silicon
    x ray diffraction
    thin films
    nanoindentation
    x ray absorption
    backscattering
    hardness
    Raman spectroscopy
    fine structure
    ion beams
    atomic force microscopy
    microwaves
    nitrogen
    microstructure
    carbon
    single crystals
    spectroscopy

    All Science Journal Classification (ASJC) codes

    • Physics and Astronomy (miscellaneous)

    Cite this

    Garratt, E., Alfaify, S., Yoshitake, T., Katamune, Y., Bowden, M., Nandasiri, M., ... Kayani, A. (2013). Effect of chromium underlayer on the properties of nano-crystalline diamond films. Applied Physics Letters, 102(1), [011913]. https://doi.org/10.1063/1.4774086

    Effect of chromium underlayer on the properties of nano-crystalline diamond films. / Garratt, E.; Alfaify, S.; Yoshitake, T.; Katamune, Y.; Bowden, M.; Nandasiri, M.; Ghantasala, M.; Mancini, D. C.; Thevuthasan, S.; Kayani, A.

    In: Applied Physics Letters, Vol. 102, No. 1, 011913, 07.01.2013.

    Research output: Contribution to journalArticle

    Garratt, E, Alfaify, S, Yoshitake, T, Katamune, Y, Bowden, M, Nandasiri, M, Ghantasala, M, Mancini, DC, Thevuthasan, S & Kayani, A 2013, 'Effect of chromium underlayer on the properties of nano-crystalline diamond films', Applied Physics Letters, vol. 102, no. 1, 011913. https://doi.org/10.1063/1.4774086
    Garratt, E. ; Alfaify, S. ; Yoshitake, T. ; Katamune, Y. ; Bowden, M. ; Nandasiri, M. ; Ghantasala, M. ; Mancini, D. C. ; Thevuthasan, S. ; Kayani, A. / Effect of chromium underlayer on the properties of nano-crystalline diamond films. In: Applied Physics Letters. 2013 ; Vol. 102, No. 1.
    @article{d8be5283fa8940ab9504b62530c7a457,
    title = "Effect of chromium underlayer on the properties of nano-crystalline diamond films",
    abstract = "This paper investigated the effect of chromium underlayer on the structure, microstructure, and composition of the nano-crystalline diamond films. Nano-crystalline diamond thin films were deposited at high temperature in microwave-induced plasma diluted with nitrogen, on single crystal silicon substrate with a thin film of chromium as an underlayer. Characterization of the film was implemented using non-Rutherford backscattering spectrometry, Raman spectroscopy, near-edge x-ray absorption fine structure, x-ray diffraction, and atomic force microscopy. Nanoindentation studies showed that the films deposited on chromium underlayer have higher hardness values compared to those deposited on silicon without an underlayer. Diamond and graphitic phases of the films evaluated by x-ray and optical spectroscopic analyses determined consistency between the sp2 and sp3 phases of carbon in chromium sample to that of diamond grown on silicon. Diffusion of chromium was observed using ion beam analysis which was correlated with the formation of chromium complexes by x-ray diffraction.",
    author = "E. Garratt and S. Alfaify and T. Yoshitake and Y. Katamune and M. Bowden and M. Nandasiri and M. Ghantasala and Mancini, {D. C.} and S. Thevuthasan and A. Kayani",
    year = "2013",
    month = "1",
    day = "7",
    doi = "10.1063/1.4774086",
    language = "English",
    volume = "102",
    journal = "Applied Physics Letters",
    issn = "0003-6951",
    publisher = "American Institute of Physics Publising LLC",
    number = "1",

    }

    TY - JOUR

    T1 - Effect of chromium underlayer on the properties of nano-crystalline diamond films

    AU - Garratt, E.

    AU - Alfaify, S.

    AU - Yoshitake, T.

    AU - Katamune, Y.

    AU - Bowden, M.

    AU - Nandasiri, M.

    AU - Ghantasala, M.

    AU - Mancini, D. C.

    AU - Thevuthasan, S.

    AU - Kayani, A.

    PY - 2013/1/7

    Y1 - 2013/1/7

    N2 - This paper investigated the effect of chromium underlayer on the structure, microstructure, and composition of the nano-crystalline diamond films. Nano-crystalline diamond thin films were deposited at high temperature in microwave-induced plasma diluted with nitrogen, on single crystal silicon substrate with a thin film of chromium as an underlayer. Characterization of the film was implemented using non-Rutherford backscattering spectrometry, Raman spectroscopy, near-edge x-ray absorption fine structure, x-ray diffraction, and atomic force microscopy. Nanoindentation studies showed that the films deposited on chromium underlayer have higher hardness values compared to those deposited on silicon without an underlayer. Diamond and graphitic phases of the films evaluated by x-ray and optical spectroscopic analyses determined consistency between the sp2 and sp3 phases of carbon in chromium sample to that of diamond grown on silicon. Diffusion of chromium was observed using ion beam analysis which was correlated with the formation of chromium complexes by x-ray diffraction.

    AB - This paper investigated the effect of chromium underlayer on the structure, microstructure, and composition of the nano-crystalline diamond films. Nano-crystalline diamond thin films were deposited at high temperature in microwave-induced plasma diluted with nitrogen, on single crystal silicon substrate with a thin film of chromium as an underlayer. Characterization of the film was implemented using non-Rutherford backscattering spectrometry, Raman spectroscopy, near-edge x-ray absorption fine structure, x-ray diffraction, and atomic force microscopy. Nanoindentation studies showed that the films deposited on chromium underlayer have higher hardness values compared to those deposited on silicon without an underlayer. Diamond and graphitic phases of the films evaluated by x-ray and optical spectroscopic analyses determined consistency between the sp2 and sp3 phases of carbon in chromium sample to that of diamond grown on silicon. Diffusion of chromium was observed using ion beam analysis which was correlated with the formation of chromium complexes by x-ray diffraction.

    UR - http://www.scopus.com/inward/record.url?scp=84872305835&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=84872305835&partnerID=8YFLogxK

    U2 - 10.1063/1.4774086

    DO - 10.1063/1.4774086

    M3 - Article

    AN - SCOPUS:84872305835

    VL - 102

    JO - Applied Physics Letters

    JF - Applied Physics Letters

    SN - 0003-6951

    IS - 1

    M1 - 011913

    ER -