Effect of Coating Self-Assembled Monolayer on Room-Temperature Bonding of Cu Micro-Interconnects

Lising Qiu, Akihiro Ikeda, Tanemasa Asano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)068004-1-3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
Volume52
Issue number6
Publication statusPublished - Jun 2013

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