Effect of contamination on quantitative X-ray microanalysis in the analytical electron microscope

Z. Horita, T. Sano, M. Nemoto

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)

    Abstract

    It is shown that the contamination on a specimen surface leads to reduction of the characteristic intensities of low-energy lines because of the absorption. The X-ray path length in the contamination deposit which builds up in cone-shape by illumination of a finely focused electron beam is estimated from the reduction of characteristic intensities and compared with the average path length derived from the geometry of the deposit. The critical path length is introduced to define the negligible absorption in contamination for the characteristic lines of energies up to a few kilo electron volts.

    Original languageEnglish
    Pages (from-to)965-978
    Number of pages14
    JournalPhilosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
    Volume63
    Issue number4
    DOIs
    Publication statusPublished - Apr 1991

    All Science Journal Classification (ASJC) codes

    • Chemical Engineering(all)
    • Physics and Astronomy(all)

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