Effect of contamination on quantitative X-ray microanalysis in the analytical electron microscope

Z. Horita, T. Sano, M. Nemoto

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

It is shown that the contamination on a specimen surface leads to reduction of the characteristic intensities of low-energy lines because of the absorption. The X-ray path length in the contamination deposit which builds up in cone-shape by illumination of a finely focused electron beam is estimated from the reduction of characteristic intensities and compared with the average path length derived from the geometry of the deposit. The critical path length is introduced to define the negligible absorption in contamination for the characteristic lines of energies up to a few kilo electron volts.

Original languageEnglish
Pages (from-to)965-978
Number of pages14
JournalPhilosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
Volume63
Issue number4
DOIs
Publication statusPublished - Apr 1991

All Science Journal Classification (ASJC) codes

  • Chemical Engineering(all)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Effect of contamination on quantitative X-ray microanalysis in the analytical electron microscope'. Together they form a unique fingerprint.

  • Cite this