Effect of diffraction condition on mean free path determination by EELS

A. Nakafuji, Yasukazu Murakami, D. Shindo

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Effect of diffraction condition on the mean free path of inelastic scattering, which is the parameter that needs to be known prior to thickness determination by EELS, was studied using platelet haematite particles. Abnormal collection angle dependence of the mean free path was observed if the energy-loss spectrum was acquired with incident electrons parallel to a zone axis, while it was absent with the electron beam off the zone axis. As a result, large deviation of the measured mean free path occurred even if the spectra were obtained from the same specimen with the same collection angle, e.g. the deviation was 24% for a sample with approximate thickness of 498 nm at the collection angle 12.1 mrad. It was justified that the abnormal dependence was owing to the dynamical diffraction effect, which strongly modified the intensity ratio of elastic and inelastic scattering.

Original languageEnglish
Pages (from-to)23-28
Number of pages6
JournalJournal of Electron Microscopy
Volume50
Issue number1
DOIs
Publication statusPublished - Apr 3 2001

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Inelastic scattering
Electron energy loss spectroscopy
mean free path
Diffraction
Electrons
Elastic scattering
Hematite
inelastic scattering
Platelets
diffraction
deviation
Electron beams
Energy dissipation
Blood Platelets
hematite
platelets
elastic scattering
energy dissipation
electron beams
electrons

All Science Journal Classification (ASJC) codes

  • Instrumentation

Cite this

Effect of diffraction condition on mean free path determination by EELS. / Nakafuji, A.; Murakami, Yasukazu; Shindo, D.

In: Journal of Electron Microscopy, Vol. 50, No. 1, 03.04.2001, p. 23-28.

Research output: Contribution to journalArticle

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