Effect of Fe impurities on the generation of process-induced microdefects in Czochralski silicon crystals

Physics

• Atoms 16%
• Crystal Defect 50%
• Crystals 33%
• Impurities 33%
• Iron 16%
• Oxidation 33%
• Oxide 66%
• Precipitate 33%
• Silicon 50%
• Sites 16%
• Wafer 33%

Biochemistry, Genetics and Molecular Biology

• Alpha Oxidation 33%
• Atom 16%
• Crystal 33%
• Dislocation 33%
• Iron 16%
• Nucleation 100%
• Stacking Fault 50%
• Surface Property 33%
• Volume 33%