Effect of film thickness on electrical and optical properties of ZnO/Ag dual layer film

Hiromi Yabe, Eri Akita, Pangpang Wang, Daisuke Yonekura, Ri Ichi Murakami, Xiaoping Song

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

ZnO/Ag dual layer films were deposited on glass substrates by DC magnetron sputtering method to clarify the effect of film thickness on the electrical and optical properties. Both the Ag film and the ZnO film were deposited with different thickness. The electrical and optical properties of the dual layer film were mainly changed by the Ag film thickness. The sheet resistance of 2.3 ohm/sq with transmittance over 80% in the visible light was obtained under the deposition time of 30 seconds for Ag and 30 minutes for ZnO film. From the result of SEM observations, the Ag was deposited on the glass substrate as discontinuous structure. Therefore, ZnO/Ag dual layer film will be expected for good performance in the transparent electrode.

Original languageEnglish
Title of host publicationAdvances in Synthesis, Processing, and Applications of Nanostructures
PublisherAmerican Ceramic Society
Pages149-155
Number of pages7
ISBN (Print)9781118273272
Publication statusPublished - Jan 1 2012
EventAdvances in Synthesis, Processing, and Applications of Nanostructures - Materials Science and Technology 2011 Conference, MS and T 2011 - Columbus, OH, United States
Duration: Oct 16 2011Oct 20 2011

Publication series

NameCeramic Transactions
Volume238
ISSN (Print)1042-1122

Other

OtherAdvances in Synthesis, Processing, and Applications of Nanostructures - Materials Science and Technology 2011 Conference, MS and T 2011
CountryUnited States
CityColumbus, OH
Period10/16/1110/20/11

Fingerprint

Film thickness
Electric properties
Optical properties
Glass
Sheet resistance
Substrates
Magnetron sputtering
Scanning electron microscopy
Electrodes

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry

Cite this

Yabe, H., Akita, E., Wang, P., Yonekura, D., Murakami, R. I., & Song, X. (2012). Effect of film thickness on electrical and optical properties of ZnO/Ag dual layer film. In Advances in Synthesis, Processing, and Applications of Nanostructures (pp. 149-155). (Ceramic Transactions; Vol. 238). American Ceramic Society.

Effect of film thickness on electrical and optical properties of ZnO/Ag dual layer film. / Yabe, Hiromi; Akita, Eri; Wang, Pangpang; Yonekura, Daisuke; Murakami, Ri Ichi; Song, Xiaoping.

Advances in Synthesis, Processing, and Applications of Nanostructures. American Ceramic Society, 2012. p. 149-155 (Ceramic Transactions; Vol. 238).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yabe, H, Akita, E, Wang, P, Yonekura, D, Murakami, RI & Song, X 2012, Effect of film thickness on electrical and optical properties of ZnO/Ag dual layer film. in Advances in Synthesis, Processing, and Applications of Nanostructures. Ceramic Transactions, vol. 238, American Ceramic Society, pp. 149-155, Advances in Synthesis, Processing, and Applications of Nanostructures - Materials Science and Technology 2011 Conference, MS and T 2011, Columbus, OH, United States, 10/16/11.
Yabe H, Akita E, Wang P, Yonekura D, Murakami RI, Song X. Effect of film thickness on electrical and optical properties of ZnO/Ag dual layer film. In Advances in Synthesis, Processing, and Applications of Nanostructures. American Ceramic Society. 2012. p. 149-155. (Ceramic Transactions).
Yabe, Hiromi ; Akita, Eri ; Wang, Pangpang ; Yonekura, Daisuke ; Murakami, Ri Ichi ; Song, Xiaoping. / Effect of film thickness on electrical and optical properties of ZnO/Ag dual layer film. Advances in Synthesis, Processing, and Applications of Nanostructures. American Ceramic Society, 2012. pp. 149-155 (Ceramic Transactions).
@inproceedings{57ba8689325c4e02adee753d1b21c1f8,
title = "Effect of film thickness on electrical and optical properties of ZnO/Ag dual layer film",
abstract = "ZnO/Ag dual layer films were deposited on glass substrates by DC magnetron sputtering method to clarify the effect of film thickness on the electrical and optical properties. Both the Ag film and the ZnO film were deposited with different thickness. The electrical and optical properties of the dual layer film were mainly changed by the Ag film thickness. The sheet resistance of 2.3 ohm/sq with transmittance over 80{\%} in the visible light was obtained under the deposition time of 30 seconds for Ag and 30 minutes for ZnO film. From the result of SEM observations, the Ag was deposited on the glass substrate as discontinuous structure. Therefore, ZnO/Ag dual layer film will be expected for good performance in the transparent electrode.",
author = "Hiromi Yabe and Eri Akita and Pangpang Wang and Daisuke Yonekura and Murakami, {Ri Ichi} and Xiaoping Song",
year = "2012",
month = "1",
day = "1",
language = "English",
isbn = "9781118273272",
series = "Ceramic Transactions",
publisher = "American Ceramic Society",
pages = "149--155",
booktitle = "Advances in Synthesis, Processing, and Applications of Nanostructures",
address = "United States",

}

TY - GEN

T1 - Effect of film thickness on electrical and optical properties of ZnO/Ag dual layer film

AU - Yabe, Hiromi

AU - Akita, Eri

AU - Wang, Pangpang

AU - Yonekura, Daisuke

AU - Murakami, Ri Ichi

AU - Song, Xiaoping

PY - 2012/1/1

Y1 - 2012/1/1

N2 - ZnO/Ag dual layer films were deposited on glass substrates by DC magnetron sputtering method to clarify the effect of film thickness on the electrical and optical properties. Both the Ag film and the ZnO film were deposited with different thickness. The electrical and optical properties of the dual layer film were mainly changed by the Ag film thickness. The sheet resistance of 2.3 ohm/sq with transmittance over 80% in the visible light was obtained under the deposition time of 30 seconds for Ag and 30 minutes for ZnO film. From the result of SEM observations, the Ag was deposited on the glass substrate as discontinuous structure. Therefore, ZnO/Ag dual layer film will be expected for good performance in the transparent electrode.

AB - ZnO/Ag dual layer films were deposited on glass substrates by DC magnetron sputtering method to clarify the effect of film thickness on the electrical and optical properties. Both the Ag film and the ZnO film were deposited with different thickness. The electrical and optical properties of the dual layer film were mainly changed by the Ag film thickness. The sheet resistance of 2.3 ohm/sq with transmittance over 80% in the visible light was obtained under the deposition time of 30 seconds for Ag and 30 minutes for ZnO film. From the result of SEM observations, the Ag was deposited on the glass substrate as discontinuous structure. Therefore, ZnO/Ag dual layer film will be expected for good performance in the transparent electrode.

UR - http://www.scopus.com/inward/record.url?scp=84871517493&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84871517493&partnerID=8YFLogxK

M3 - Conference contribution

SN - 9781118273272

T3 - Ceramic Transactions

SP - 149

EP - 155

BT - Advances in Synthesis, Processing, and Applications of Nanostructures

PB - American Ceramic Society

ER -