Effect of film thickness on electrical and optical properties of ZnO/Ag dual layer film

Hiromi Yabe, Eri Akita, Pangpang Wang, Daisuke Yonekura, Ri Ichi Murakami, Xiaoping Song

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    ZnO/Ag dual layer films were deposited on glass substrates by DC magnetron sputtering method to clarify the effect of film thickness on the electrical and optical properties. Both the Ag film and the ZnO film were deposited with different thickness. The electrical and optical properties of the dual layer film were mainly changed by the Ag film thickness. The sheet resistance of 2.3 ohm/sq with transmittance over 80% in the visible light was obtained under the deposition time of 30 seconds for Ag and 30 minutes for ZnO film. From the result of SEM observations, the Ag was deposited on the glass substrate as discontinuous structure. Therefore, ZnO/Ag dual layer film will be expected for good performance in the transparent electrode.

    Original languageEnglish
    Title of host publicationAdvances in Synthesis, Processing, and Applications of Nanostructures
    PublisherAmerican Ceramic Society
    Pages149-155
    Number of pages7
    ISBN (Print)9781118273272
    DOIs
    Publication statusPublished - Jan 1 2012
    EventAdvances in Synthesis, Processing, and Applications of Nanostructures - Materials Science and Technology 2011 Conference, MS and T 2011 - Columbus, OH, United States
    Duration: Oct 16 2011Oct 20 2011

    Publication series

    NameCeramic Transactions
    Volume238
    ISSN (Print)1042-1122

    Other

    OtherAdvances in Synthesis, Processing, and Applications of Nanostructures - Materials Science and Technology 2011 Conference, MS and T 2011
    CountryUnited States
    CityColumbus, OH
    Period10/16/1110/20/11

    All Science Journal Classification (ASJC) codes

    • Ceramics and Composites
    • Materials Chemistry

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  • Cite this

    Yabe, H., Akita, E., Wang, P., Yonekura, D., Murakami, R. I., & Song, X. (2012). Effect of film thickness on electrical and optical properties of ZnO/Ag dual layer film. In Advances in Synthesis, Processing, and Applications of Nanostructures (pp. 149-155). (Ceramic Transactions; Vol. 238). American Ceramic Society. https://doi.org/10.1002/9781118511428.ch17