Effect of Higher-Order Silane Deposition on Spatial Profile of Si-H2/Si-H Bond Density Ratio of a-Si:H Films*)

Liu Shi, Kazuma Tanaka, Hisayuki Hara, Shota Nagaishi, Daisuke Yamashita, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

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Physics & Astronomy