Effect of laser irradiation on the properties of ZnO buffer layers and its application to selective-growth of ZnO nano/microcrystals

Tetsuya Shimogaki, Hirotaka Kawahara, Shihomi Nakao, Kosuke Harada, Mitsuhiro Higashihata, Hiroshi Ikenoue, Yoshiki Nakara, Daisuke Nakamura, Tatsuo Okada

Research output: Contribution to journalArticle

Abstract

ZnO nanocrystals, which are characterized by their configurations and fine structures, are unique oxide semiconductors. They are synthesized by nanoparticle-assisted pulsed laser deposition on ZnO buffer layers deposited on a-cut sapphire substrates. In this report, the new possibilities of UV laser-processing to the field of ZnO buffer layers and ZnO nano/microcrystals are suggested. Effects of ultraviolet laser-irradiation on morphological and electrical properties of ZnO buffer layers were investigated. After laser irradiation, surface work function increased in the region laser-irradiated at 300 mJ/cm 2 , whereas it decreased in the region laser-irradiated at 500 mJ/cm 2 . Then, ZnO nanowires were synthesized on the ZnO buffer layers locally laser-irradiated at 300 mJ/cm 2 and 500 mJ/cm 2 by nanoparticle-assisted pulsed laser deposition. Number densities of ZnO nan-owires were varied depend on laser fluences. It decreased in the region pre-laser-irradiated at 300 mJ/cm 2 , whereas it increased in the region pre-laser-irradiated at 500 mJ/cm 2 . Additionally, it was demonstrated that periodically-aligned ZnO microcrystals can be synthesized using four-beam interference laser irradiation to the ZnO buffer layers followed by nanoparticle-assisted pulsed laser deposition. Since these processes do not require any catalysts, they are expected to be the new fabrication method for ZnO nano/micro crystals.

Original languageEnglish
Pages (from-to)259-262
Number of pages4
JournalJournal of Laser Micro Nanoengineering
Volume10
Issue number3
DOIs
Publication statusPublished - Jan 1 2015

Fingerprint

Microcrystals
microcrystals
Laser beam effects
Buffer layers
buffers
irradiation
Lasers
lasers
Pulsed laser deposition
pulsed laser deposition
Nanoparticles
ultraviolet lasers
nanoparticles
Ultraviolet lasers
Sapphire
Nanocrystals
Nanowires
Electric properties
nanocrystals
fluence

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

Effect of laser irradiation on the properties of ZnO buffer layers and its application to selective-growth of ZnO nano/microcrystals. / Shimogaki, Tetsuya; Kawahara, Hirotaka; Nakao, Shihomi; Harada, Kosuke; Higashihata, Mitsuhiro; Ikenoue, Hiroshi; Nakara, Yoshiki; Nakamura, Daisuke; Okada, Tatsuo.

In: Journal of Laser Micro Nanoengineering, Vol. 10, No. 3, 01.01.2015, p. 259-262.

Research output: Contribution to journalArticle

Shimogaki, Tetsuya ; Kawahara, Hirotaka ; Nakao, Shihomi ; Harada, Kosuke ; Higashihata, Mitsuhiro ; Ikenoue, Hiroshi ; Nakara, Yoshiki ; Nakamura, Daisuke ; Okada, Tatsuo. / Effect of laser irradiation on the properties of ZnO buffer layers and its application to selective-growth of ZnO nano/microcrystals. In: Journal of Laser Micro Nanoengineering. 2015 ; Vol. 10, No. 3. pp. 259-262.
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