Effect of laser irradiation on the properties of ZnO buffer layers and its application to selective-growth of ZnO nano/microcrystals

Tetsuya Shimogaki, Hirotaka Kawahara, Shihomi Nakao, Kosuke Harada, Mitsuhiro Higashihata, Hiroshi Ikenoue, Yoshiki Nakara, Daisuke Nakamura, Tatsuo Okada

Research output: Contribution to journalArticlepeer-review

Abstract

ZnO nanocrystals, which are characterized by their configurations and fine structures, are unique oxide semiconductors. They are synthesized by nanoparticle-assisted pulsed laser deposition on ZnO buffer layers deposited on a-cut sapphire substrates. In this report, the new possibilities of UV laser-processing to the field of ZnO buffer layers and ZnO nano/microcrystals are suggested. Effects of ultraviolet laser-irradiation on morphological and electrical properties of ZnO buffer layers were investigated. After laser irradiation, surface work function increased in the region laser-irradiated at 300 mJ/cm2, whereas it decreased in the region laser-irradiated at 500 mJ/cm2. Then, ZnO nanowires were synthesized on the ZnO buffer layers locally laser-irradiated at 300 mJ/cm2 and 500 mJ/cm2 by nanoparticle-assisted pulsed laser deposition. Number densities of ZnO nan-owires were varied depend on laser fluences. It decreased in the region pre-laser-irradiated at 300 mJ/cm2, whereas it increased in the region pre-laser-irradiated at 500 mJ/cm2. Additionally, it was demonstrated that periodically-aligned ZnO microcrystals can be synthesized using four-beam interference laser irradiation to the ZnO buffer layers followed by nanoparticle-assisted pulsed laser deposition. Since these processes do not require any catalysts, they are expected to be the new fabrication method for ZnO nano/micro crystals.

Original languageEnglish
Pages (from-to)259-262
Number of pages4
JournalJournal of Laser Micro Nanoengineering
Volume10
Issue number3
DOIs
Publication statusPublished - 2015

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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