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Effect of Mn-Based Slurries on Chemical Mechanical Polishing of SiC Substrates
Panpan Zhao, Tao Yin, Toshiro Doi, Syuhei Kurokawa, Kiyoshi Seshimo, Dongfen Ye, Jianchen Cai
Research output: Contribution to journal › Article › peer-review
2
Citations
(Scopus)