Effect of Surface Oxygen Concentration on Wafer Strength in Floating Zone Si Wafers

Jun Fujise, Bonggyun Ko, Toshiaki Ono, Masaki Tanaka

    Research output: Contribution to journalArticlepeer-review

    Original languageEnglish
    Article number104002
    Number of pages7
    JournalECS Journal of Solid State Science and Technology
    Volume9
    Publication statusPublished - Oct 7 2020

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