Effect of Surface Oxygen Concentration on Wafer Strength in Floating Zone Si Wafers

Jun Fujise, Bonggyun Ko, Toshiaki Ono, Masaki Tanaka

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Article number104002
Number of pages7
JournalECS Journal of Solid State Science and Technology
Volume9
Publication statusPublished - Oct 7 2020

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