Effect of the boron-to-nitrogen ratio on leakage current characteristics of boron nitride films prepared by surface-wave plasma enhanced chemical vapor deposition

Y. Kamimura, T. Matsuura, K. Teii, S. Matsumoto

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effect of the boron-to-nitrogen ratio on leakage current characteristics of boron nitride films prepared by surface-wave plasma enhanced chemical vapor deposition'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy