Effect of underetching on thermal conductivity measurement of suspended nanofilm

Yohei Ito, Koji Takahashi, Tatsuya Ikuta, Xing Zhang

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The measurement of the in-plane thermal conductivity of a nanofilm by the direct-current heating method is examined by a numerical heat transfer simulation to obtain reliable data for nanosensor applications. A platinum film of 500 nm in width and 10 μm in length is fabricated to be suspended between two terminals. An underetched part always exists on the edge of the terminals owing to the isotropic etching process, which causes a temperature jump at the end of the suspended film. As a result, the thermal conductivity measured by the direct- current heating method is found to be underestimated from the intrinsic properties of the suspended nanofilm. Numerical simulations are conducted to calculate the temperature jump and the necessary correction of thermal conductivity is derived, which critically depends on the width of the underetched part. The corrected thermal conductivity is discussed with the simultaneously obtained electrical conductivity in comparison with the bulk data.

Original languageEnglish
JournalJapanese Journal of Applied Physics
Volume48
Issue number5 PART 3
DOIs
Publication statusPublished - May 1 2009

Fingerprint

Thermal conductivity
thermal conductivity
direct current
Nanosensors
Heating
heating
Platinum
Etching
platinum
simulation
heat transfer
etching
Heat transfer
Temperature
electrical resistivity
temperature
causes
Computer simulation

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Effect of underetching on thermal conductivity measurement of suspended nanofilm. / Ito, Yohei; Takahashi, Koji; Ikuta, Tatsuya; Zhang, Xing.

In: Japanese Journal of Applied Physics, Vol. 48, No. 5 PART 3, 01.05.2009.

Research output: Contribution to journalArticle

@article{21fee00990a1423c850d53035446d90b,
title = "Effect of underetching on thermal conductivity measurement of suspended nanofilm",
abstract = "The measurement of the in-plane thermal conductivity of a nanofilm by the direct-current heating method is examined by a numerical heat transfer simulation to obtain reliable data for nanosensor applications. A platinum film of 500 nm in width and 10 μm in length is fabricated to be suspended between two terminals. An underetched part always exists on the edge of the terminals owing to the isotropic etching process, which causes a temperature jump at the end of the suspended film. As a result, the thermal conductivity measured by the direct- current heating method is found to be underestimated from the intrinsic properties of the suspended nanofilm. Numerical simulations are conducted to calculate the temperature jump and the necessary correction of thermal conductivity is derived, which critically depends on the width of the underetched part. The corrected thermal conductivity is discussed with the simultaneously obtained electrical conductivity in comparison with the bulk data.",
author = "Yohei Ito and Koji Takahashi and Tatsuya Ikuta and Xing Zhang",
year = "2009",
month = "5",
day = "1",
doi = "10.1143/JJAP.48.05EB01",
language = "English",
volume = "48",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Institute of Physics",
number = "5 PART 3",

}

TY - JOUR

T1 - Effect of underetching on thermal conductivity measurement of suspended nanofilm

AU - Ito, Yohei

AU - Takahashi, Koji

AU - Ikuta, Tatsuya

AU - Zhang, Xing

PY - 2009/5/1

Y1 - 2009/5/1

N2 - The measurement of the in-plane thermal conductivity of a nanofilm by the direct-current heating method is examined by a numerical heat transfer simulation to obtain reliable data for nanosensor applications. A platinum film of 500 nm in width and 10 μm in length is fabricated to be suspended between two terminals. An underetched part always exists on the edge of the terminals owing to the isotropic etching process, which causes a temperature jump at the end of the suspended film. As a result, the thermal conductivity measured by the direct- current heating method is found to be underestimated from the intrinsic properties of the suspended nanofilm. Numerical simulations are conducted to calculate the temperature jump and the necessary correction of thermal conductivity is derived, which critically depends on the width of the underetched part. The corrected thermal conductivity is discussed with the simultaneously obtained electrical conductivity in comparison with the bulk data.

AB - The measurement of the in-plane thermal conductivity of a nanofilm by the direct-current heating method is examined by a numerical heat transfer simulation to obtain reliable data for nanosensor applications. A platinum film of 500 nm in width and 10 μm in length is fabricated to be suspended between two terminals. An underetched part always exists on the edge of the terminals owing to the isotropic etching process, which causes a temperature jump at the end of the suspended film. As a result, the thermal conductivity measured by the direct- current heating method is found to be underestimated from the intrinsic properties of the suspended nanofilm. Numerical simulations are conducted to calculate the temperature jump and the necessary correction of thermal conductivity is derived, which critically depends on the width of the underetched part. The corrected thermal conductivity is discussed with the simultaneously obtained electrical conductivity in comparison with the bulk data.

UR - http://www.scopus.com/inward/record.url?scp=70249150390&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=70249150390&partnerID=8YFLogxK

U2 - 10.1143/JJAP.48.05EB01

DO - 10.1143/JJAP.48.05EB01

M3 - Article

AN - SCOPUS:70249150390

VL - 48

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 5 PART 3

ER -