Effects of aluminum incorporation on diamond grain growth in ultrananocrystalline diamond/hydrogenated amorphous carbon composite films prepared by coaxial arc plasma deposition

Yüki Katamune, Shinya Ohmagari, Itsuroh Suzuki, Tsuyoshi Yoshitake

    Research output: Contribution to journalArticle

    2 Citations (Scopus)

    Abstract

    Al-incorporated ultrananocrystalline diamond/hydrogenated amorphous carbon composite films were prepared by coaxial arc plasma deposition with an Al-blended graphite target. The grain size estimated from X-ray diffraction peaks was 27 nm; this value is an order of magnitude larger than that of unincorporated films. The appearance of diamond-200 and 222 peaks, which generally disappear due to the extinction rule of diffraction, and the dilation of lattice, implied the incorporation of Al atoms into the lattices. The near-edge X-ray absorption fine-structure showed a sharp exciton peak due to diamond, which is attributed to the enlarged grains.

    Original languageEnglish
    Article number068002
    JournalJapanese journal of applied physics
    Volume51
    Issue number6 PART 1
    DOIs
    Publication statusPublished - Jun 1 2012

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

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