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Effects of amplitude modulation of rf discharge voltage on growth of nano-particles in reactive plasmas
Kunihiro Kamataki, Hiroshi Miyata, Kazunori Koga, Giichiro Uchida, Naho Itagaki, Daisuke Yamashita, Hidefumi Matsuzaki, Masaharu Shiratani
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Citation
(Scopus)