Effects of cluster incorporation into hydrogenated amorphous silicon films in initial discharge phase on film stability

Susumu Toko, Yoshihiro Torigoe, Weiting Chen, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

We studied the effects of incorporation of hydrogenated amorphous silicon (a-Si:H) nanoparticles (clusters) generated in the initial discharge phase on light induced degradation of a-Si:H films. The amount of clusters incorporated into the films in the initial discharge phase is 15 times larger than that in the steady state. To evaluate the effects of such initial cluster incorporation on stability of a-Si:H films, we fabricated a-Si:H Schottky cells with and without initial cluster incorporation using a multi-hollow discharge plasma chemical vapor deposition method with a shutter and compared cell stability against light exposure. The degradation ratio of the cell without initial cluster incorporation is less than 1% even after 100 hour light soaking of 2.7 suns. Our results show that suppressing initial cluster incorporation into a-Si:H films is a key to stable a-Si:H cells. Moreover, Si-H2 bonds in films can be reduced down to 1/10 using a cluster eliminating filter.

Original languageEnglish
Pages (from-to)126-131
Number of pages6
JournalThin Solid Films
Volume587
DOIs
Publication statusPublished - Jan 1 2015

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silicon films
Amorphous silicon
amorphous silicon
cells
Degradation
degradation
Chemical vapor deposition
soaking
shutters
Nanoparticles
plasma jets
Plasmas
hollow
vapor deposition
filters
nanoparticles

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Effects of cluster incorporation into hydrogenated amorphous silicon films in initial discharge phase on film stability. / Toko, Susumu; Torigoe, Yoshihiro; Chen, Weiting; Yamashita, Daisuke; Seo, Hyunwoong; Itagaki, Naho; Koga, Kazunori; Shiratani, Masaharu.

In: Thin Solid Films, Vol. 587, 01.01.2015, p. 126-131.

Research output: Contribution to journalArticle

Toko, Susumu ; Torigoe, Yoshihiro ; Chen, Weiting ; Yamashita, Daisuke ; Seo, Hyunwoong ; Itagaki, Naho ; Koga, Kazunori ; Shiratani, Masaharu. / Effects of cluster incorporation into hydrogenated amorphous silicon films in initial discharge phase on film stability. In: Thin Solid Films. 2015 ; Vol. 587. pp. 126-131.
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AU - Seo, Hyunwoong

AU - Itagaki, Naho

AU - Koga, Kazunori

AU - Shiratani, Masaharu

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