Effects of cluster incorporation into hydrogenated amorphous silicon films in initial discharge phase on film stability

Susumu Toko, Yoshihiro Torigoe, Weiting Chen, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science