Effects of hydrogen dilution on electron density in multi-hollow discharges with magnetic field for A-Si:H film deposition

Kazunori Koga, Yuuki Kawashima, Kenta Nakahara, Takeaki Matsunaga, William Makoto Nakamura, Masaharu Shiratani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science