Effects of hydrogen introduction on electrical and optical properties of Cd-doped Ge oxide and Zn oxide thin films

Makoto Arita, Hirofumi Konishi, Kouichi Matsuda, Masataka Masuda, Yasunori Hayashi

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Cadmium-doped Ge oxide and Zn oxide thin films were deposited by RF magnetron sputtering. The electrical and optical properties of these films were investigated. All deposited films except for highly Cd-doped Ge oxide were transparent to visible light. Hydrogen introduction reduced the resistivity of the films, although the optical transmittance for visible light did not change significantly. The enhancement of conductivity could be attributed to the increase in carder density by the hydrogen introduction.

Original languageEnglish
Pages (from-to)1142-1145
Number of pages4
JournalMaterials Transactions
Volume43
Issue number5
DOIs
Publication statusPublished - May 2002
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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