Effects of irradiation with ions and photons in ultraviolet-vacuum ultraviolet regions on nano-surface properties of polymers exposed to plasmas

Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

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The interactions of ions and photons in ultraviolet (UV) and vacuum ultraviolet (VUV) regions from argon plasmas with polymer surfaces were investigated by of depth analysis of chemical bonding states in the nano-surface layer of poly(ethylene terephthalate) (PET) films via conventional X-ray photoelectron spectroscopy (XPS) and hard X-ray photoelectron spectroscopy (HXPES). The PET films were exposed to argon plasmas by covering the PET films with MgF2 and quartz windows as optical filters to compare the irradiation effects with ions and photons. The conventional XPS results indicated that oxygen functionalities (the C-O bond and the O-C-O bond) were degraded by ion bombardment in the shallower region up to about 10 nm from the surface, whereas the effect of photoirradiation in the UV and VUV regions was insignificant. The HXPES analysis showed that irradiation with ions and photons did not cause serious damage in chemical bonding states in the deeper region up to about 50nm from the surface.

Original languageEnglish
Article number01AJ02
JournalJapanese journal of applied physics
Issue number1 PART 2
Publication statusPublished - Jan 1 2012


All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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