TY - JOUR
T1 - Effects of photoirradiation in UV and VUV regions during plasma exposure to polymers
AU - Cho, Ken
AU - Setsuhara, Yuichi
AU - Takenaka, Kosuke
AU - Shiratani, Masaharu
AU - Sekine, Makoto
AU - Hori, Masaru
N1 - Funding Information:
This work was partly supported by The Global COE Program “Center of Excellence for Advanced Structural and Functional Materials Design” through the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan , and Grant-in-Aid for Cooperative Research Project on “Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials” from MEXT, Japan. The synchrotron radiation experiments were performed at the SPring-8 with the approval of Japan Synchrotron Radiation Research Institute (JASRI) as Nanotechnology Support Project of MEXT, Japan.
PY - 2011/8/1
Y1 - 2011/8/1
N2 - Interactions between photons irradiated from Ar-O2 mixture plasmas and polymer surfaces were investigated on the basis of depth analyses of chemical bonding states in the nano-surface layer of polyethylene terephthalate (PET) films via hard X-ray photoelectron spectroscopy (HXPES) and conventional X-ray photoelectron spectroscopy (XPS). The PET films were exposed to photons from the Ar-O2 mixture plasmas by covering the PET samples with MgF2 and quartz windows as optical filters for evaluation of photoirradiation effects in ultraviolet (UV) and vacuum ultraviolet (VUV) regions. The HXPES results indicated that the degradation of the chemical bonding states due to photoirradiation in regions was insignificant in deeper regions up to about 50 nm from the surface. Whereas, conventional XPS analysis showed that CO bond, OCO bond and CO bond increased after photoirradiation in UV and VUV regions. These results suggest that the increase in oxygen functionalities (CO bond, OCO bond and CO bond) may be attributed to chemical reactions and/or terminations of scissed bonds via photodecompositions of the polymer with oxygen and/or OH species (oxygen molecules and radicals during plasma exposure and/or oxygen molecules and moisture after taking the PET samples out of the plasma reactor to the ambient air) in the vicinity of the sample surface.
AB - Interactions between photons irradiated from Ar-O2 mixture plasmas and polymer surfaces were investigated on the basis of depth analyses of chemical bonding states in the nano-surface layer of polyethylene terephthalate (PET) films via hard X-ray photoelectron spectroscopy (HXPES) and conventional X-ray photoelectron spectroscopy (XPS). The PET films were exposed to photons from the Ar-O2 mixture plasmas by covering the PET samples with MgF2 and quartz windows as optical filters for evaluation of photoirradiation effects in ultraviolet (UV) and vacuum ultraviolet (VUV) regions. The HXPES results indicated that the degradation of the chemical bonding states due to photoirradiation in regions was insignificant in deeper regions up to about 50 nm from the surface. Whereas, conventional XPS analysis showed that CO bond, OCO bond and CO bond increased after photoirradiation in UV and VUV regions. These results suggest that the increase in oxygen functionalities (CO bond, OCO bond and CO bond) may be attributed to chemical reactions and/or terminations of scissed bonds via photodecompositions of the polymer with oxygen and/or OH species (oxygen molecules and radicals during plasma exposure and/or oxygen molecules and moisture after taking the PET samples out of the plasma reactor to the ambient air) in the vicinity of the sample surface.
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U2 - 10.1016/j.tsf.2011.04.060
DO - 10.1016/j.tsf.2011.04.060
M3 - Article
AN - SCOPUS:80051551358
SN - 0040-6090
VL - 519
SP - 6810
EP - 6814
JO - Thin Solid Films
JF - Thin Solid Films
IS - 20
ER -