Effects of Si Layer Thickness on Solid-Phase Crystallization of Stacked Ge/Si/SiO2Structures

Translated title of the contribution: Effects of Si Layer Thickness on Solid-Phase Crystallization of Stacked Ge/Si/SiO2Structures

Taizoh Sadoh, Hiroki Ohta, Masanobu Miyao

Research output: Contribution to journalArticlepeer-review

Translated title of the contributionEffects of Si Layer Thickness on Solid-Phase Crystallization of Stacked Ge/Si/SiO2Structures
Original languageUndefined/Unknown
Pages (from-to)03B004-03B004
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume48
Issue number3
Publication statusPublished - Mar 23 2009

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