Effects of surface coating on cylinder rods prepared using sputtering deposition method with modulated magnetic field

Hiroharu Kawasaki, Katsuki Shibahara, Tamiko Ohshima, Yoshihito Yagyu, Yoshiaki Suda

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

Tungsten (W), carbon (C), and titanium (Ti) thin films were prepared on carbide steel cylinder rods using a new magnetron sputtering deposition method to prevent their corrosion or increase their friction resistance. In this method, plasma was generated between the cylinder rod anode substrate and the cylinder pipe targets, and it moved toward the axial direction with the generation of a modulated magnetic field by a lowfrequency alternating coil current. Experimental results showed that the surface morphology of the film became smooth, and the surface roughness of the film decreased. Deposition rate and film uniformity increased with the use of a modulated magnetic field, and friction coefficient increased as a result of the film preparation used.

Original languageEnglish
Article number08JF01
JournalJapanese journal of applied physics
Volume49
Issue number8 PART 2
DOIs
Publication statusPublished - Aug 2010
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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