We demonstrate high conversion efficiency for extreme ultraviolet (EUV) emission at 6.5-6.7nm from multiple laser beam-produced onedimensional spherical plasmas. Multiply charged-state ions produce strong resonance emission lines, which combine to yield intense unresolved transition arrays (UTAs) in Gd, Tb, and Mo. At an optimum laser intensity of 1 × 1012W/cm 2, which is estimated to yield an electron temperature of around 100 eV, the maximum in-band EUV conversion efficiency (CE) was observed to be 0.8%, which is one of the highest values ever reported due to the reduction of plasma expansion loss.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)