Efficient silicon nitride grating coupler with a dielectric multilayer reflector

Jianxun Hong, Shiyoshi Yokoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A highly efficient grating coupler with a dielectric multilayer reflector for silicon nitride photonic integrated circuits was proposed. Design, fabrication and optical characterization were presented. The peak coupling efficiency and 3 dB bandwidth are -4.5 dB and 68.0 nm, respectively. The fabrication process is CMOS-compatible with only one etching step.

Original languageEnglish
Title of host publication22nd Microoptics Conference, MOC 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages58-59
Number of pages2
ISBN (Electronic)9784863486096
DOIs
Publication statusPublished - Nov 19 2017
Event22nd Microoptics Conference, MOC 2017 - Tokyo, Japan
Duration: Nov 19 2017Nov 22 2017

Publication series

Name22nd Microoptics Conference, MOC 2017
Volume2017-November

Other

Other22nd Microoptics Conference, MOC 2017
CountryJapan
CityTokyo
Period11/19/1711/22/17

Fingerprint

Silicon nitride
silicon nitrides
couplers
reflectors
Multilayers
gratings
Fabrication
fabrication
Photonics
integrated circuits
Integrated circuits
Etching
CMOS
etching
photonics
bandwidth
Bandwidth
silicon nitride

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

Cite this

Hong, J., & Yokoyama, S. (2017). Efficient silicon nitride grating coupler with a dielectric multilayer reflector. In 22nd Microoptics Conference, MOC 2017 (pp. 58-59). (22nd Microoptics Conference, MOC 2017; Vol. 2017-November). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/MOC.2017.8244493

Efficient silicon nitride grating coupler with a dielectric multilayer reflector. / Hong, Jianxun; Yokoyama, Shiyoshi.

22nd Microoptics Conference, MOC 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 58-59 (22nd Microoptics Conference, MOC 2017; Vol. 2017-November).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hong, J & Yokoyama, S 2017, Efficient silicon nitride grating coupler with a dielectric multilayer reflector. in 22nd Microoptics Conference, MOC 2017. 22nd Microoptics Conference, MOC 2017, vol. 2017-November, Institute of Electrical and Electronics Engineers Inc., pp. 58-59, 22nd Microoptics Conference, MOC 2017, Tokyo, Japan, 11/19/17. https://doi.org/10.23919/MOC.2017.8244493
Hong J, Yokoyama S. Efficient silicon nitride grating coupler with a dielectric multilayer reflector. In 22nd Microoptics Conference, MOC 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 58-59. (22nd Microoptics Conference, MOC 2017). https://doi.org/10.23919/MOC.2017.8244493
Hong, Jianxun ; Yokoyama, Shiyoshi. / Efficient silicon nitride grating coupler with a dielectric multilayer reflector. 22nd Microoptics Conference, MOC 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 58-59 (22nd Microoptics Conference, MOC 2017).
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