Electrical Patterning System Utilizing On-Demand Micro-Plasma-Bubbles

Yu Yamashita, Natsumi Basaki, Shinya Sakuma, Yoko Yamanishi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have proposed electrical patterning system utilizing on-demand micro-plasma-bubbles that is applicable to the various substrates such as dry/wet and conductive/non-conductive materials. In this study, we investigated the pulse conditions for generating micro-plasma-bubbles, and found that three modes of bubble generation: single-pulse to single-bubble (SPSB), multi-pulses to single bubble (MPSB), and all-pulses to single bubble (APSB) modes. Next, we confirmed that the pulse interval was also critical parameters for drawing the electrical pattern. Finally, we demonstrated electrical patterning on a glass substrate using the constructed system.

Original languageEnglish
Title of host publication21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages529-532
Number of pages4
ISBN (Electronic)9781665412674
DOIs
Publication statusPublished - Jun 20 2021
Event21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States
Duration: Jun 20 2021Jun 25 2021

Publication series

Name21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/TerritoryUnited States
CityVirtual, Online
Period6/20/216/25/21

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Control and Optimization
  • Instrumentation

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