Electrical properties of homoepitaxial boron-doped diamond thin films grown by chemical vapor deposition using trimethylboron as dopant

Shigeharu Morooka, Terumi Fukui, Kiyohiko Semoto, Toshiki Tsubota, Takeyasu Saito, Katsuki Kusakabe, Hideaki Maeda, Yasunori Hayashi, Tanemasa Asano

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Fingerprint Dive into the research topics of 'Electrical properties of homoepitaxial boron-doped diamond thin films grown by chemical vapor deposition using trimethylboron as dopant'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science