Electrochemical metal deposition is utilized to fabricate micro- and nano-structures. A variety of the structures have been achieved in metal patterning and structuring and also in the structure formation of silicon itself. The controlling factors and conditions of the size, morphology and distribution have been investigated. The importance of metal deposition by displacement reaction should be recognized.
|Number of pages||10|
|Journal||Current Opinion in Solid State and Materials Science|
|Publication status||Published - Jun 2006|
All Science Journal Classification (ASJC) codes
- Materials Science(all)