TY - JOUR
T1 - Electrochemical micromachining using a solid electrochemical reaction at the metal/β″-Al2O3 microcontact
AU - Kamada, Kai
AU - Tokutomi, Masaaki
AU - Enomoto, Naoya
AU - Hojo, Junichi
N1 - Funding Information:
The authors thank to Prof. Y. Matsumoto of Kumamoto University for assistance of microarea XRD measurements. The present work was partly supported by the Asahi Glass Foundation, Japan and a Grant-in-Aid for Scientific Research No. 17685022, and the Priority Area “Nanoionics (439)” No. 17041014 from the Ministry of Education, Culture, Sports, Science, and Technology, Japan.
PY - 2007/3/1
Y1 - 2007/3/1
N2 - A simple solid state technique for electrochemical micromachining of metal substrates using a metal ion conductor (Na-β″-Al2O3) was proposed. The fundamental solid electrochemical cell consists of a (anode) metal substrate (M = Ag, Cu, Zn, and Pb)/pyramidal Na-β″-Al2O3/Ag (cathode) system, where the contact diameter between M/Na-β″-Al2O3 was extremely small, on the order of a few micrometer. Under an applied electric field, the metal substrate was electrochemically oxidized to metal ions (Mn+) at the M/Na-β″-Al2O3 microcontact. These Mn+ ions migrated into the Na-β″-Al2O3. As a result of continuous electrolysis, the metal substrate was locally consumed at the microcontact, and thus solid state electrochemical micromachining was accomplished. As expected, the machining size or depth depended on the electrolysis conditions (current, operating time) and the apex configuration of pyramidal Na-β″-Al2O3. Moreover, the scanning of the Na-β″-Al2O3 pyramid during electrolysis produced a fine patterned metal substrate. In the present paper, solid state electrochemical micromachining was performed for several metal substrates, and its advantages and disadvantages vis-a-vis the conventional electrochemical micromachining method are discussed in detail.
AB - A simple solid state technique for electrochemical micromachining of metal substrates using a metal ion conductor (Na-β″-Al2O3) was proposed. The fundamental solid electrochemical cell consists of a (anode) metal substrate (M = Ag, Cu, Zn, and Pb)/pyramidal Na-β″-Al2O3/Ag (cathode) system, where the contact diameter between M/Na-β″-Al2O3 was extremely small, on the order of a few micrometer. Under an applied electric field, the metal substrate was electrochemically oxidized to metal ions (Mn+) at the M/Na-β″-Al2O3 microcontact. These Mn+ ions migrated into the Na-β″-Al2O3. As a result of continuous electrolysis, the metal substrate was locally consumed at the microcontact, and thus solid state electrochemical micromachining was accomplished. As expected, the machining size or depth depended on the electrolysis conditions (current, operating time) and the apex configuration of pyramidal Na-β″-Al2O3. Moreover, the scanning of the Na-β″-Al2O3 pyramid during electrolysis produced a fine patterned metal substrate. In the present paper, solid state electrochemical micromachining was performed for several metal substrates, and its advantages and disadvantages vis-a-vis the conventional electrochemical micromachining method are discussed in detail.
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U2 - 10.1016/j.electacta.2006.10.052
DO - 10.1016/j.electacta.2006.10.052
M3 - Article
AN - SCOPUS:33847038859
SN - 0013-4686
VL - 52
SP - 3739
EP - 3745
JO - Electrochimica Acta
JF - Electrochimica Acta
IS - 11
ER -