Electrodeposition of refractory metals from some ZnCl2-based molten salts at 150-250°C

Toshiyuki Nohira, Hironori Nakajima, Kan Kitagawa, Rika Hagiwara, Kouji Nitta, Shinji Inazawa, Kazunori Okada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The solubility of WO3 in a eutectic NaCl-KCl-ZnCl2 (20:20:60 mol%) melt at 250°C was increased by addition of KF, which enabled the electrodeposition of metallic tungsten. A smooth and dense tungsten film having 0.7 μm thickness was obtained on a nickel substrate by potentiostatic electrolysis at 0.06 V vs. Zn(II)ZZn for 3 h in the NaCl-KCl-ZnCl 2-KF(4 mol% added)-WO3(0.54 mol% added) melt at 250°C The surface of the nickel contact probe pin for semiconductor testing, which had been manufactured by the conventional LIGA process, was successfully coated with tungsten by using this molten salt. To lower the electrodeposition temperature, a new molten salt system, EMPyrCl-ZnCl2, was developed. An equimolar EMPyrCl-ZnCl2 system was a stable liquid at 40-200°C A metallic molybdenum film was electrodeposited on a nickel substrate in the melt containing KF and MoCl5 at 150°C. copyright The Electrochemical Society.

Original languageEnglish
Title of host publicationECS Transactions - 15th International Symposium on Molten Salts
Pages333-340
Number of pages8
Edition35
DOIs
Publication statusPublished - Dec 1 2007
Externally publishedYes
Event15th International Symposium on Molten Salts - 210th ECS Meeting - Cancun, Mexico
Duration: Oct 29 2006Nov 3 2006

Publication series

NameECS Transactions
Number35
Volume3
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

Other15th International Symposium on Molten Salts - 210th ECS Meeting
CountryMexico
CityCancun
Period10/29/0611/3/06

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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    Nohira, T., Nakajima, H., Kitagawa, K., Hagiwara, R., Nitta, K., Inazawa, S., & Okada, K. (2007). Electrodeposition of refractory metals from some ZnCl2-based molten salts at 150-250°C. In ECS Transactions - 15th International Symposium on Molten Salts (35 ed., pp. 333-340). (ECS Transactions; Vol. 3, No. 35). https://doi.org/10.1149/1.2798676