TY - JOUR
T1 - Electron microscopic analysis of surface damaged layer in Pb(Mg1/3Nb2/3)O3-PbTiO3 single crystal
AU - Kasuya, Yusuke
AU - Sato, Yukio
AU - Urakami, Ryosuke
AU - Yamada, Kazuhiro
AU - Teranishi, Ryo
AU - Kaneko, Kenji
N1 - Funding Information:
Part of this work was supported by a Grant-in-Aid for Young Scientists (A) (15H05545) from the Japan Society for the Promotion of Science (JSPS). Electron microscopy observation was conducted at the Ultramicroscopy Center, Kyushu University.
Publisher Copyright:
© 2017 The Japan Society of Applied Physics.
PY - 2017/1
Y1 - 2017/1
N2 - Single crystals of lead magnesium niobate-lead titanate, Pb (Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT), have superior dielectric and piezoelectric properties suitable for medical ultrasound imaging. Imaging devices with superior performance can be manufactured from thinner PMN-PT single crystals by mechanical dicing and/or polishing. Although it is often a concern that a damaged layer may form during the mechanical dicing and/or thinning process, the microscopic characteristics of the damaged layer have not yet been investigated in detail. In this study, the microstructural characterization of a damaged layer was investigated by transmission electron microscopy. It was found that mechanical polishing introduced dislocation near the surface of the crystal. It was also found that the domain structure was affected by the introduction of dislocation.
AB - Single crystals of lead magnesium niobate-lead titanate, Pb (Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT), have superior dielectric and piezoelectric properties suitable for medical ultrasound imaging. Imaging devices with superior performance can be manufactured from thinner PMN-PT single crystals by mechanical dicing and/or polishing. Although it is often a concern that a damaged layer may form during the mechanical dicing and/or thinning process, the microscopic characteristics of the damaged layer have not yet been investigated in detail. In this study, the microstructural characterization of a damaged layer was investigated by transmission electron microscopy. It was found that mechanical polishing introduced dislocation near the surface of the crystal. It was also found that the domain structure was affected by the introduction of dislocation.
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U2 - 10.7567/JJAP.56.010312
DO - 10.7567/JJAP.56.010312
M3 - Article
AN - SCOPUS:85007499910
VL - 56
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 1
M1 - 010312
ER -