Electron microscopy studies of microstructures in β-Ga2O3 single crystals

Encarnación G. Víllora; Yasukazu Murakami; Takasi Sugawara; Toshiyuki Atou; Masae Kikuchi; Daisuke Shindo; Tsuguo Fukuda

doi:10.1016/S0025-5408(02)00689-X

Electron microscopy studies of microstructures in β-Ga₂O₃ single crystals

Encarnación G. Víllora, Yasukazu Murakami, Takasi Sugawara, Toshiyuki Atou, Masae Kikuchi, Daisuke Shindo, Tsuguo Fukuda

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

Microstructures of as-grown and annealed β-Ga₂O₃ single crystals were studied by electron microscopy. Energy filtered electron diffraction patterns exhibited weak diffuse scattering at 1/2 and 1/4 positions between the fundamental reflections along the q₂₀₄̄ vector. Dark-field images observed with the 1/2 diffuse scattering showed a characteristic domain-like structure, where the size of each domain was less than 5nm. The diffused scattering was somewhat weakened by annealing the specimen. The observations indicate a non-homogeneous structural modulation, which is considered to be related to the distribution of oxygen vacancies.

Original language	English
Pages (from-to)	769-774
Number of pages	6
Journal	Materials Research Bulletin
Volume	37
Issue number	4
DOIs	https://doi.org/10.1016/S0025-5408(02)00689-X
Publication status	Published - Mar 25 2002
Externally published	Yes

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1016/S0025-5408(02)00689-X

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title = "Electron microscopy studies of microstructures in β-Ga2O3 single crystals",

abstract = "Microstructures of as-grown and annealed β-Ga2O3 single crystals were studied by electron microscopy. Energy filtered electron diffraction patterns exhibited weak diffuse scattering at 1/2 and 1/4 positions between the fundamental reflections along the q20{\=4} vector. Dark-field images observed with the 1/2 diffuse scattering showed a characteristic domain-like structure, where the size of each domain was less than 5nm. The diffused scattering was somewhat weakened by annealing the specimen. The observations indicate a non-homogeneous structural modulation, which is considered to be related to the distribution of oxygen vacancies.",

author = "V{\'i}llora, {Encarnaci{\'o}n G.} and Yasukazu Murakami and Takasi Sugawara and Toshiyuki Atou and Masae Kikuchi and Daisuke Shindo and Tsuguo Fukuda",

note = "Funding Information: The authors are thankful to Mr. Y. Hayasaka, HVEM Laboratory, Tohoku University, for the use of the ion-milling facility. This work is partially supported by Grant-in-aid for Scientific Research no.12650001, JSPS.",

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doi = "10.1016/S0025-5408(02)00689-X",

language = "English",

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T1 - Electron microscopy studies of microstructures in β-Ga2O3 single crystals

AU - Víllora, Encarnación G.

AU - Murakami, Yasukazu

AU - Sugawara, Takasi

AU - Atou, Toshiyuki

AU - Kikuchi, Masae

AU - Shindo, Daisuke

AU - Fukuda, Tsuguo

N1 - Funding Information: The authors are thankful to Mr. Y. Hayasaka, HVEM Laboratory, Tohoku University, for the use of the ion-milling facility. This work is partially supported by Grant-in-aid for Scientific Research no.12650001, JSPS.

PY - 2002/3/25

Y1 - 2002/3/25

N2 - Microstructures of as-grown and annealed β-Ga2O3 single crystals were studied by electron microscopy. Energy filtered electron diffraction patterns exhibited weak diffuse scattering at 1/2 and 1/4 positions between the fundamental reflections along the q204̄ vector. Dark-field images observed with the 1/2 diffuse scattering showed a characteristic domain-like structure, where the size of each domain was less than 5nm. The diffused scattering was somewhat weakened by annealing the specimen. The observations indicate a non-homogeneous structural modulation, which is considered to be related to the distribution of oxygen vacancies.

AB - Microstructures of as-grown and annealed β-Ga2O3 single crystals were studied by electron microscopy. Energy filtered electron diffraction patterns exhibited weak diffuse scattering at 1/2 and 1/4 positions between the fundamental reflections along the q204̄ vector. Dark-field images observed with the 1/2 diffuse scattering showed a characteristic domain-like structure, where the size of each domain was less than 5nm. The diffused scattering was somewhat weakened by annealing the specimen. The observations indicate a non-homogeneous structural modulation, which is considered to be related to the distribution of oxygen vacancies.

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Electron microscopy studies of microstructures in β-Ga₂O₃ single crystals

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