Electron microscopy studies of microstructures in β-Ga2O3 single crystals

Encarnación G. Víllora, Yasukazu Murakami, Takasi Sugawara, Toshiyuki Atou, Masae Kikuchi, Daisuke Shindo, Tsuguo Fukuda

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19 Citations (Scopus)

Abstract

Microstructures of as-grown and annealed β-Ga2O3 single crystals were studied by electron microscopy. Energy filtered electron diffraction patterns exhibited weak diffuse scattering at 1/2 and 1/4 positions between the fundamental reflections along the q204̄ vector. Dark-field images observed with the 1/2 diffuse scattering showed a characteristic domain-like structure, where the size of each domain was less than 5nm. The diffused scattering was somewhat weakened by annealing the specimen. The observations indicate a non-homogeneous structural modulation, which is considered to be related to the distribution of oxygen vacancies.

Original languageEnglish
Pages (from-to)769-774
Number of pages6
JournalMaterials Research Bulletin
Volume37
Issue number4
DOIs
Publication statusPublished - Mar 25 2002
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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    Víllora, E. G., Murakami, Y., Sugawara, T., Atou, T., Kikuchi, M., Shindo, D., & Fukuda, T. (2002). Electron microscopy studies of microstructures in β-Ga2O3 single crystals. Materials Research Bulletin, 37(4), 769-774. https://doi.org/10.1016/S0025-5408(02)00689-X