Electron-temperature control in 915 MHz electron cyclotron resonance plasma

N. Itagaki, Y. Kawai, S. Kawakami, Nobuo Ishii

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The electron-temperature control of a 915 MHz electron cyclotron resonance (ECR) plasma was discussed. It was found that the electron temperature in an ECR plasma changes with the changing spatial profiles of the power absorption. It was also found that the electron temperature is controlled by changing the gradient in the magneticfield strength and the microwave frequency.

Original languageEnglish
Pages (from-to)1969-1973
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume20
Issue number6
DOIs
Publication statusPublished - Nov 2002

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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