Abstract
Electron transport of glow-discharged C2H2- and CH4-based SiCx:H films has been studied by time-of-flight method. The electron mobility at room temperature decreases nearly exponentially with increasing carbon content in both C2H2- and CH4-based films. This decrease is mainly due to a broadening of the tail states width in SiCx:H films, as implied from the carbon content dependence of the activation energy of the electron mobility in CH4-based films.
Original language | English |
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Pages (from-to) | 340-346 |
Number of pages | 7 |
Journal | Solar Energy Materials |
Volume | 23 |
Issue number | 2-4 |
DOIs | |
Publication status | Published - Dec 1 1991 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Engineering(all)