Electronic data acquisition and operational control system for time-of-flight sputtered neutral mass spectrometer

Ken ichi Bajo, Osamu Fujioka, Satoru Itose, Morio Ishihara, Kiichiro Uchino, Hisayoshi Yurimoto

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A new electric data acquisition and operational control system was developed for time-of-flight sputtered neutral mass spectrometry (TOF-SNMS). The system is designed for high-speed data acquisition, data processing, and data streaming. The developed system is constructed on an NI-PXI platform and provides timing clocks for the TOF-SNMS operation. The system performs data processing of noise suppression and ion counting while acquiring TOF mass spectrum for 13-microsecond length at sampling rate of 3 GS/s for every 1 millisecond. In addition, the system acquires and records TOF mass spectrum of 60-microsecond length at sampling rate of 3 GS/s for every 1 millisecond without data processing. The system detects single ion signals from accumulated TOF mass spectrum of 107 times and counts up to 10 ions accurately from a single event of TOF mass spectrum.

Original languageEnglish
Pages (from-to)35-39
Number of pages5
JournalSurface and Interface Analysis
Volume51
Issue number1
DOIs
Publication statusPublished - Jan 2019

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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