Abstract
A new electric data acquisition and operational control system was developed for time-of-flight sputtered neutral mass spectrometry (TOF-SNMS). The system is designed for high-speed data acquisition, data processing, and data streaming. The developed system is constructed on an NI-PXI platform and provides timing clocks for the TOF-SNMS operation. The system performs data processing of noise suppression and ion counting while acquiring TOF mass spectrum for 13-microsecond length at sampling rate of 3 GS/s for every 1 millisecond. In addition, the system acquires and records TOF mass spectrum of 60-microsecond length at sampling rate of 3 GS/s for every 1 millisecond without data processing. The system detects single ion signals from accumulated TOF mass spectrum of 107 times and counts up to 10 ions accurately from a single event of TOF mass spectrum.
Original language | English |
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Pages (from-to) | 35-39 |
Number of pages | 5 |
Journal | Surface and Interface Analysis |
Volume | 51 |
Issue number | 1 |
DOIs | |
Publication status | Published - Jan 2019 |
All Science Journal Classification (ASJC) codes
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry