Electrostatic inkjet patterning using Si needle prepared by anodization

Yuji Ishida, Kazunori Hakiai, Kazunari Matsuzaki, Akiyoshi Baba, Tanemasa Asano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Electrostatic inkjet pattern formation was carried out using Si-needle inkjet head. The head was fabricated by preparing the Si needle using anodization of Si(100) with pn-junction at the surface and transferring the needle to another Si substrate using direct bonding technique. The printed pattern was observed with an optical microscope. The line width decreased with increasing the scanning velocity. The fine patterning technology was expected to facilitate the application of the liquid ejection technology to various electronic devices.

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2004
Pages28-29
Number of pages2
Publication statusPublished - 2004
Externally publishedYes
Event2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan
Duration: Oct 26 2004Oct 29 2004

Other

Other2004 International Microprocesses and Nanotechnology Conference
CountryJapan
CityOsaka
Period10/26/0410/29/04

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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